Explore our custom OEM/ODM thermal tubes, plasma rings, reactor vessels, and optical chambers manufactured under ISO 9001 quality systems and export-packaged for direct air freight to Frankfurt am Main (FRA Hub).
Thermal Heating
Chemical Labs
Semiconductor
Pressure Tested
Epitaxy / Etch
CVD Furnace
UV Optics
Catalysis
Precision quartz rings serve as vital mission-critical consumable components in wafer-processing chambers, epitaxy systems, plasma etching, and chemical vapor deposition (CVD). Within demanding processing atmospheres, the mechanical stability, dielectric strength, and trace chemical profile of fused quartz directly dictate batch yields, wafer defect densities, and preventative maintenance intervals.
Fabricated at Zunex Quartz Products Co., Ltd. inside Donghai County—internationally recognized as China's primary hub for natural silica refining and synthesized SiO₂ growth—our quartz rings provide European engineers with unmatched material integrity. With thermal shock resistance surviving continuous operating thresholds of 1100°C and transient peaks at 1300°C, these vitreous quartz components exhibit virtually zero thermal expansion (5.5 × 10⁻⁷ /°C), mitigating micro-cracking and dimensional creep during high-cycling thermal annealing.
| Property Parameter | JGS1 (Synthetic Fused Silica) | JGS2 (Optical Fused Quartz) | JGS3 (Infrared Fused Silica) |
|---|---|---|---|
| Primary Transmission Spectrum | 185 nm – 2500 nm (Deep DUV/UV) | 220 nm – 2500 nm (UV to Visible) | 260 nm – 3500 nm (Visible to Mid-IR) |
| Hydroxyl Content ([OH⁻]) | ≤ 1200 ppm (Hydroxyl Rich) | ≤ 150 – 200 ppm | ≤ 5 ppm (Water-Free Vacuum Fused) |
| SiO₂ Purity Grade | ≥ 99.999% (5N Synthetic) | ≥ 99.99% (4N Industrial Optical) | ≥ 99.995% (High Purity Arc Melt) |
| Typical Rhine-Main Application | Excimer laser viewports, EUV lithography tooling, laser interference rings | Semiconductor CVD clamp rings, etch baffle rings, furnace liners | High-power infrared heaters, epitaxial thermal sensors, pyrometer viewports |
| Thermal Expansion (0–300°C) | 5.4 × 10⁻⁷ / K | 5.5 × 10⁻⁷ / K | 5.5 × 10⁻⁷ / K |
| Surface Lapping & Roughness | Ra ≤ 0.2 nm (Super-polished) | Ra 0.4 – 0.8 nm (Flame or mechanical) | Ra ≤ 0.8 nm (Diamond turned / ground) |
For etching systems exposed to corrosive fluorine- and chlorine-based radical plasmas (such as CF₄, SF₆, and NF₃), surface-erosion mechanics govern component life. Standard borosilicate or inferior quartz glasses generate catastrophic metallic contamination (specifically Fe, Na, Cu, and Ca ion migration). Zunex utilizes exclusively low-alkali fused silica, maintaining trace metallic impurities below 15 ppm aggregate across all industrial lines, and below 1 ppm for semiconductor-grade custom runs. This guarantees consistent etch rates and prevents cross-contamination across active silicon or gallium nitride (GaN) wafers.
Strategically connected through Frankfurt Airport’s Air Cargo Logistics Hub, Zunex delivers precision-machined quartz rings, twin-tubes, and reactor chambers directly to the premier industrial and research zones of Hesse.
Frankfurt's historic Industriepark Höchst hosts over 90 world-scale chemical, pharmaceutical, and biotechnology leaders. Our custom quartz reaction rings, ozone-free reaction vessels, and catalytic container tubes deliver zero leaching and total chemical inertness against aggressive acids (hot HCl, HNO₃, H₂SO₄) during pilot-scale and analytical process engineering.
Spanning Frankfurt, Hanau, and Darmstadt, the regional electronics cluster requires micro-machined quartz focus rings, edge rings, and wafer clamping rings for physical vapor deposition (PVD) and dry-etch equipment. With laser-trepanned vacuum ports and flatnesses polished within λ/4, our rings maintain optimal electrical field uniformity across substrate chucks.
The optical corridor between Wetzlar and Frankfurt demands non-birefringent, bubble-free optical rings and windows for high-energy beam delivery, LiDAR calibration, and spectroscopic imaging. JGS1 synthetic silica ensures higher than 92% internal transmission at deep ultraviolet wavelengths down to 193 nm without solarization.
As European technological sovereignty accelerates under the European Chips Act, Rhine-Main equipment manufacturers and contract labs demand resilient, high-speed OEM customization that circumvents inflated domestic lead times.
By bypassing multi-tier regional brokers, German engineering teams acquire custom quartz components direct from the Donghai manufacturing source, capturing 35% to 50% procurement savings without compromising tight tolerance budgets.
Research centers in Hessen cannot wait 16–20 weeks for single-prototype quartz runs. Zunex completes drawing analysis in under 2 hours and dispatches fabricated prototypes via priority air cargo directly into Frankfurt-Flughafen in 7 to 10 days.
In accordance with tightening EU REACH chemical mandates and German environmental standards, our quartz fabrication processes use pristine thermo-mechanical cutting and laser ablation, avoiding toxic fluoropolymer additives and ozone precursors.
Every shipment intended for German production lines includes spectrographic material certificates, CMM dimensional inspection logs, and cleanroom vacuum packaging that guarantees zero particle contamination upon unpackaging.
With an established footprint exporting throughout Europe and a verified 43% repeat purchase rate, Zunex Quartz Products Co., Ltd. blends heavy industrial capacity with microscopic precision.
We perform diamond CNC milling, ultra-precise laser trepanning, internal grooving, and stepped counterbores on rings up to Ø650 mm with wall thicknesses down to 0.5 mm, maintaining dimensional deviations inside ±0.01 mm.
Send DWG, STEP, or PDF engineering prints. Our technical department reviews tolerancing, chamfers, thermal points, and fabrication routes, responding with comprehensive DFM quotes in two hours or less during German business hours.
Fragile quartz glass mandates specialized packaging. We wrap all parts in shock-absorbing EPE multi-layer foam, followed by vacuum-sealed nitrogen anti-static bags, and crate inside heavy-ply fumigated timber boxes engineered for air and sea transit.
Key facts on customs clearance, Incoterms, purity documentation, and manufacturing tolerances for engineering and purchasing departments.
Upload your design specifications or 2D/3D drawings. Our engineering division will evaluate material feasibility, specify ideal silica grades (JGS1/JGS2/JGS3), and return an itemized DDP Frankfurt quotation within 2 hours.